Performance improvement of Si-CCD detector based backside reflected light and photon emission microscopy by FIB ultimate substrate thinning
A. Glowacki, C. Boit, P. PerduVolume:
51
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.microrel.2011.06.044
File:
PDF, 1003 KB
english, 2011