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Backside failure analysis case study: Implementation of innovative Local Backside Deprocessing technique
A. Laroche, P. Rousseille, T. ZirilliVolume:
51
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.microrel.2011.06.065
File:
PDF, 1.32 MB
english, 2011