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Comprehensive nanostructural study of SSRM nanocontact on silicon
T. Delaroque, B. Domengès, A. Colder, K. DaniloVolume:
51
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.microrel.2011.07.067
File:
PDF, 880 KB
english, 2011