On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies
Usama Zaghloul, George Papaioannou, Bharat Bhushan, Fabio Coccetti, Patrick Pons, Robert PlanaVolume:
51
Year:
2011
Language:
english
Pages:
9
DOI:
10.1016/j.microrel.2011.07.081
File:
PDF, 1.51 MB
english, 2011