Erratum to “On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies” [MR 51/9–11 (2011) 1810–1818]
Usama Zaghloul, George Papaioannou, Bharat Bhushan, Fabio Coccetti, Patrick Pons, Robert PlanaVolume:
51
Year:
2011
Language:
english
DOI:
10.1016/j.microrel.2011.10.008
File:
PDF, 112 KB
english, 2011