Micromachined anti-scatter grid fabricated using...

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 2011 Vol. 652; Iss. 1

Micromachined anti-scatter grid fabricated using crystalline wet etching of (1 1 0) silicon and metal electroplating for X-ray imaging

Dae-Hun Jeong, Jae Myung Kim, Do Young Noh, Kwang Hyun Kim, Jong-Hyun Lee
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Volume:
652
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.nima.2010.08.116
File:
PDF, 1.06 MB
english, 2011
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