Development of in situ, at-wavelength metrology for soft...

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 2011 Vol. 649; Iss. 1

Development of in situ, at-wavelength metrology for soft X-ray nano-focusing

Sheng Yuan, Valeriy V. Yashchuk, Kenneth A. Goldberg, Richard Celestre, Wayne R. McKinney, Gregory Y. Morrison, Tony Warwick, Howard A. Padmore
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Volume:
649
Year:
2011
Language:
english
Pages:
3
DOI:
10.1016/j.nima.2010.10.134
File:
PDF, 205 KB
english, 2011
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