Characterization of electron microscopes with binary...

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 2011 Vol. 649; Iss. 1

Characterization of electron microscopes with binary pseudo-random multilayer test samples

Valeriy V. Yashchuk, Raymond Conley, Erik H. Anderson, Samuel K. Barber, Nathalie Bouet, Wayne R. McKinney, Peter Z. Takacs, Dmitriy L. Voronov
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Volume:
649
Year:
2011
Language:
english
Pages:
3
DOI:
10.1016/j.nima.2010.11.124
File:
PDF, 448 KB
english, 2011
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