Development and applications of a two-dimensional...

Development and applications of a two-dimensional tip-tilting stage system with nanoradian-level positioning resolution

Deming Shu, Wah-Keat Lee, Wenjun Liu, Gene E. Ice, Yuri Shvyd'ko, Kwang-Je Kim
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Volume:
649
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.nima.2011.01.039
File:
PDF, 770 KB
english, 2011
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