Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2004 Vol. 217; Iss. 1
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Surface analytical studies of ion-implanted uni-directionally aligned silicon nitride for tribological applications
Naoki Nakamura, Kiyoshi Hirao, Yukihiko YamauchiVolume:
217
Year:
2004
Language:
english
Pages:
9
DOI:
10.1016/j.nimb.2003.09.024
File:
PDF, 897 KB
english, 2004