Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2004 Vol. 217; Iss. 1
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Accurate calibration of the retained fluence from a versatile single wafer implanter using RBS
G Boudreault, G Claudio, C Jeynes, R Low, B.J SealyVolume:
217
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.nimb.2003.09.033
File:
PDF, 302 KB
english, 2004