Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2004 Vol. 217; Iss. 2
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A simple microwave component for the vacuum window protection in an ECR ion source for ion beam processing
Ph Coste, L Wartski, J Aubert, C SchwebelVolume:
217
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2003.10.005
File:
PDF, 320 KB
english, 2004