Kinoform X-ray lens creation in polymer materials by deep...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2004 Vol. 217; Iss. 3

Kinoform X-ray lens creation in polymer materials by deep X-ray lithography

V Nazmov, L Shabel'nikov, F.-J Pantenburg, J Mohr, E Reznikova, A Snigirev, I Snigireva, S Kouznetsov, M DiMichiel
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Volume:
217
Year:
2004
Language:
english
Pages:
8
DOI:
10.1016/j.nimb.2003.11.002
File:
PDF, 407 KB
english, 2004
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