Study of the chemical and morphological evolution of the...

Study of the chemical and morphological evolution of the GaAs surface after high fluence focused ion beam exposure

A. Lugstein, B. Basnar, E. Bertagnolli
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Volume:
217
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.nimb.2003.11.010
File:
PDF, 498 KB
english, 2004
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