Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2004 Vol. 217; Iss. 3
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Study of the chemical and morphological evolution of the GaAs surface after high fluence focused ion beam exposure
A. Lugstein, B. Basnar, E. BertagnolliVolume:
217
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.nimb.2003.11.010
File:
PDF, 498 KB
english, 2004