Ion beam induced defects in crystalline silicon

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2004 Vol. 216; Iss. none

Ion beam induced defects in crystalline silicon

F Cristiano, N Cherkashin, X Hebras, P Calvo, Y Lamrani, E Scheid, B de Mauduit, B Colombeau, W Lerch, S Paul, A Claverie
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Volume:
216
Year:
2004
Language:
english
Pages:
11
DOI:
10.1016/j.nimb.2003.11.019
File:
PDF, 605 KB
english, 2004
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