Depth dependence of defect evolution and TED during...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2004 Vol. 216; Iss. none

Depth dependence of defect evolution and TED during annealing

B. Colombeau, N.E.B. Cowern, F. Cristiano, P. Calvo, Y. Lamrani, N. Cherkashin, E. Lampin, A. Claverie
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Volume:
216
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2003.11.025
File:
PDF, 346 KB
english, 2004
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