Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2004 Vol. 216; Iss. none
Comparative analysis of the implantation-induced structural modifications in GaAs and Ge
I.D. Desnica-FrankovicVolume:
216
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.nimb.2003.11.054
File:
PDF, 304 KB
english, 2004