Implant isolation of AlGaAs multilayer DBR

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2004 Vol. 218; Iss. none

Implant isolation of AlGaAs multilayer DBR

A.V.P. Coelho, H. Boudinov, T.v. Lippen, H.H. Tan, C. Jagadish
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Volume:
218
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2003.12.059
File:
PDF, 286 KB
english, 2004
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