Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2004 Vol. 219-220; Iss. none
A new secondary ion mass spectrometry (SIMS) system with high-intensity cluster ion source
Jiro Matsuo, Chihiro Okubo, Toshio Seki, Takaaki Aoki, Noriaki Toyoda, Isao YamadaVolume:
219-220
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2004.01.103
File:
PDF, 393 KB
english, 2004