Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2004 Vol. 222; Iss. 3-4
![](/img/cover-not-exists.png)
Ion beam induced intermixing of interface structures in W/Si multilayers
M.J.H Kessels, J Verhoeven, A.E Yakshin, F.D Tichelaar, F BijkerkVolume:
222
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.nimb.2004.03.006
File:
PDF, 367 KB
english, 2004