Ion beam induced intermixing of interface structures in...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2004 Vol. 222; Iss. 3-4

Ion beam induced intermixing of interface structures in W/Si multilayers

M.J.H Kessels, J Verhoeven, A.E Yakshin, F.D Tichelaar, F Bijkerk
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Volume:
222
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.nimb.2004.03.006
File:
PDF, 367 KB
english, 2004
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