Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2004 Vol. 222; Iss. 3-4
Implantation of P ions in SiO2 layers with embedded Si nanocrystals
G.A Kachurin, S.G Cherkova, V.A Volodin, V.G Kesler, A.K Gutakovsky, A.G Cherkov, A.V Bublikov, D.I TetelbaumVolume:
222
Year:
2004
Language:
english
Pages:
8
DOI:
10.1016/j.nimb.2004.03.076
File:
PDF, 448 KB
english, 2004