Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2012 Vol. 272; Iss. none
Extra source implantation for suppression floating-body effect in partially depleted SOI MOSFETs
Jing Chen, Jiexin Luo, Qingqing Wu, Zhan Chai, Xiaolu Huang, Xing Wei, Xi WangVolume:
272
Year:
2012
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2011.01.048
File:
PDF, 620 KB
english, 2012