Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2012 Vol. 272; Iss. none
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Fabrication of a negative PMMA master mold for soft-lithography by MeV ion beam lithography
Nitipon Puttaraksa, Somrit Unai, Michael W. Rhodes, Kanda Singkarat, Harry J. Whitlow, Somsorn SingkaratVolume:
272
Year:
2012
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2011.01.053
File:
PDF, 607 KB
english, 2012