3D patterning of Ag nanoparticles by ULE ion implantation...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2012 Vol. 272; Iss. none

3D patterning of Ag nanoparticles by ULE ion implantation and stencil soft lithography for plasmonic device applications

Gerard BenAssayag, Cosmin Farcau, Patrizio Benzo, Laura Cattaneo, Caroline Bonafos, Béatrice Pecassou, Antoine Zwick, Robert Carles
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Volume:
272
Year:
2012
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2011.01.068
File:
PDF, 594 KB
english, 2012
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