Influence of Si nanocrystal embedded in BOX on radiation...

Influence of Si nanocrystal embedded in BOX on radiation and electrical properties of SOI wafer

Dawei Bi, Zhengxuan Zhang, Ming Chen, Aimin Wu, Xing Wei, Xi Wang
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Volume:
272
Year:
2012
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2011.01.078
File:
PDF, 607 KB
english, 2012
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