Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2012 Vol. 272; Iss. none
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Ion beam assisted crystallization of amorphous silicon layers using high current density Gallium beams
Jonathan England, Michael W. Phaneuf, Alexandre Laquerre, Andrew Smith, Russell GwilliamVolume:
272
Year:
2012
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2011.01.111
File:
PDF, 678 KB
english, 2012