Exposure parameters in proton beam writing for KMPR and EPO...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2011 Vol. 269; Iss. 20

Exposure parameters in proton beam writing for KMPR and EPO Core negative tone photoresists

M.D. Ynsa, P. Shao, S.R. Kulkarni, N.N. Liu, J.A. van Kan
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Volume:
269
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2011.02.027
File:
PDF, 538 KB
english, 2011
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