Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2011 Vol. 269; Iss. 21
Si related defects in the VUV in silicon multi-energy implanted Type III silica
R.H. Magruder III, R.A. Weeks, Y. MorimotoVolume:
269
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.nimb.2011.06.021
File:
PDF, 464 KB
english, 2011