Calibration correction of ultra low energy SIMS profiles...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2012 Vol. 273; Iss. none

Calibration correction of ultra low energy SIMS profiles based on MEIS analyses for arsenic shallow implants in silicon

E. Demenev, D. Giubertoni, J. van den Berg, M. Reading, M. Bersani
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Volume:
273
Year:
2012
Language:
english
Pages:
3
DOI:
10.1016/j.nimb.2011.07.073
File:
PDF, 679 KB
english, 2012
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