Carrier gas and ion beam parameter effects on the structure...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2012 Vol. 282; Iss. none

Carrier gas and ion beam parameter effects on the structure and properties of a-C:H/SiOx films deposited employing closed drift ion beam source

Asta Tamulevičienė, Šarūnas Meškinis, Vitoldas Kopustinskas, Sigitas Tamulevičius
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Volume:
282
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.nimb.2011.08.064
File:
PDF, 577 KB
english, 2012
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