Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2012 Vol. 284; Iss. none
Local strain induced in silicon by Si3N4 lines: Modeling and experimental investigation via X-ray diffraction
Y. Ezzaidi, G. Gaudeau, S. Escoubas, O. Thomas, P. MorinVolume:
284
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.nimb.2011.08.067
File:
PDF, 1.11 MB
english, 2012