Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2012 Vol. 279; Iss. none
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Effects of 200 keV argon ions irradiation on microstructural properties of titanium nitride films
M. Popović, M. Novaković, M. Šiljegović, N. BibićVolume:
279
Year:
2012
Language:
english
Pages:
3
DOI:
10.1016/j.nimb.2011.10.033
File:
PDF, 606 KB
english, 2012