Matrix effect-free depth profiling of multilayered Si/Ti...

Matrix effect-free depth profiling of multilayered Si/Ti with laser-SNMS

Suguru Nishinomiya, Naoyoshi Kubota, Shun-ichi Hayashi, Hisataka Takenaka
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Volume:
283
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.nimb.2012.04.019
File:
PDF, 756 KB
english, 2012
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