Digital moiré fringe measurement method for alignment in...

Optics & Laser Technology 2012 Vol. 44; Iss. 2

Digital moiré fringe measurement method for alignment in imprint lithography

Jinyou Shao, Yucheng Ding, Hongmiao Tian, Xin Li, Xiangming Li, Hongzhong Liu
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Volume:
44
Year:
2012
Language:
english
Pages:
6
DOI:
10.1016/j.optlastec.2011.08.010
File:
PDF, 544 KB
english, 2012
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