Spectroscopic ellipsometry analyses of thin films in...

Spectroscopic ellipsometry analyses of thin films in different environments: An innovative “reverse side” approach allowing multi angle measurements

Enrico Della Gaspera, Stefano Schutzmann, Massimo Guglielmi, Alessandro Martucci
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Volume:
34
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.optmat.2011.07.014
File:
PDF, 481 KB
english, 2011
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