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Micro-machined Pendulum and Non-driven Micro-machined Gyroscope
Fu-xue Zhang, Sheng-jie Qin, Lin-xia Tan, Hui ZhaoVolume:
22
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.phpro.2011.11.080
File:
PDF, 736 KB
english, 2011