Contact-free exhaust system for vacuum compatible gas bearing guides
Nils Heidler, Christoph Schenk, Gerd Harnisch, Stefan Risse, Gerhard Schubert, Ramona Eberhardt, Andreas TünnermannVolume:
36
Year:
2012
Language:
english
Pages:
7
DOI:
10.1016/j.precisioneng.2011.07.005
File:
PDF, 922 KB
english, 2012