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Basic characteristics of a multilayer thin electrostatic actuator supported by lubricating oil for a fine-motion stage
Mariam Md Ghazaly, Kaiji SatoVolume:
36
Year:
2012
Language:
english
Pages:
7
DOI:
10.1016/j.precisioneng.2011.07.008
File:
PDF, 1.36 MB
english, 2012