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Ductile mode material removal and high-pressure phase transformation in silicon during micro-laser assisted machining
Deepak Ravindra, Muralidhar K. Ghantasala, John PattenVolume:
36
Year:
2012
Language:
english
Pages:
4
DOI:
10.1016/j.precisioneng.2011.12.003
File:
PDF, 434 KB
english, 2012