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Sticking probability of CN(X2Σ+) radicals onto amorphous carbon nitride films formed from the decomposition of BrCN induced by the microwave discharge flow of Ar
Haruhiko Ito, Hitoshi Araki, Akira Wada, Ayumi Yamamoto, Tsuneo Suzuki, Hidetoshi SaitohVolume:
86
Year:
2012
Language:
english
Pages:
10
DOI:
10.1016/j.saa.2011.10.033
File:
PDF, 957 KB
english, 2012