Intrinsic stress development and microstructure evolution of Au/Cr/Si multilayer thin films subject to annealing
David C. Miller, Cari F. Herrmann, Hans J. Maier, Steve M. George, Conrad R. Stoldt, Ken GallVolume:
52
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.scriptamat.2005.01.004
File:
PDF, 444 KB
english, 2005