The effect of annealing and chemical mechanical polishing...

Scripta Materialia 2009 Vol. 60; Iss. 11

The effect of annealing and chemical mechanical polishing on Ge2Sb2Te5 phase change memory

Min Zhong, Zhitang Song, Bo Liu, Yifeng Chen, Yuefeng Gong, Feng Rao, Songlin Feng, Fuxiong Zhang, Yanghui Xiang
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Volume:
60
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.scriptamat.2009.02.023
File:
PDF, 599 KB
english, 2009
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