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Three-dimensional atom probe investigations of Ti–Al–N thin films
R. Rachbauer, E. Stergar, S. Massl, M. Moser, P.H. MayrhoferVolume:
61
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.scriptamat.2009.06.015
File:
PDF, 302 KB
english, 2009