Nanovoid formation through the annealing of amorphous Al2O3...

Nanovoid formation through the annealing of amorphous Al2O3 and WO3 films

R. Nakamura, T. Shudo, A. Hirata, M. Ishimaru, H. Nakajima
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Volume:
64
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.scriptamat.2010.09.043
File:
PDF, 440 KB
english, 2011
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