Pull-in-based μg-resolution accelerometer: Characterization...

Sensors and Actuators A: Physical 2011 Vol. 172; Iss. 1

Pull-in-based μg-resolution accelerometer: Characterization and noise analysis

Rosana A. Dias, Edmond Cretu, Reinoud Wolffenbuttel, Luis A. Rocha
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Volume:
172
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2011.01.027
File:
PDF, 945 KB
english, 2011
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