Effect of humidity and temperature on the fatigue behavior...

Sensors and Actuators A: Physical 2011 Vol. 170; Iss. 1-2

Effect of humidity and temperature on the fatigue behavior of polysilicon thin film

Shoji Kamiya, Yusuke Ikeda, João Gaspar, Oliver Paul
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Volume:
170
Year:
2011
Language:
english
Pages:
9
DOI:
10.1016/j.sna.2011.06.007
File:
PDF, 1.14 MB
english, 2011
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