Interferometric study of reliability of microcantilevers...

Sensors and Actuators A: Physical 2011 Vol. 171; Iss. 2

Interferometric study of reliability of microcantilevers driven by AlN sandwiched between two metal layers

K. Krupa, C. Gorecki, R. Jóźwicki, M. Józwik, A. Andrei
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Volume:
171
Year:
2011
Language:
english
Pages:
11
DOI:
10.1016/j.sna.2011.07.017
File:
PDF, 1.63 MB
english, 2011
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