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Microcantilever sensors with embedded piezoresistive transistor read-out: Design and characterization
Pushpapraj Singh, Jianmin Miao, Lichun Shao, Rama Krishna Kotlanka, Woo-Tae Park, Dim-Lee KwongVolume:
171
Year:
2011
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2011.08.012
File:
PDF, 1.53 MB
english, 2011