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PMN–PT (lead magnesium niobate–lead titanate) piezoelectric material micromachining by excimer laser ablation and dry etching (DRIE)
Ioan Alexandru Ivan, Joël Agnus, Pierre LambertVolume:
177
Year:
2012
Language:
english
Pages:
11
DOI:
10.1016/j.sna.2011.09.015
File:
PDF, 2.63 MB
english, 2012