Dual-mode device for in situ testing of MEMS packaging quality
M.A.G. Suijlen, C. van der Avoort, J.T.M. van Beek, J.J. Koning, H.C.W. BeijerinckVolume:
175
Year:
2012
Language:
english
Pages:
11
DOI:
10.1016/j.sna.2011.12.039
File:
PDF, 870 KB
english, 2012